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Main Business

Business Part

MiCo

HTT_RS-CVIR Tech

Through MiCo's CVIR-SiC surface treatment, oxidation resistance and surface stabilization of graphite and C/C products can be implemented. After SiC surface treatment, there is no dimensional deformation, and the surface defects, pinholes, cracks, and carbon fiber exposure in graphite and C/C products are eliminated, effectively controlling outgassing and particle generation.

The maximum usable temperature is A-RS = 1600°C and RS = 1400°C. In some cases, Multi-Layer coatings are possible, and the adhesion of the coating is improved.

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Coating Property

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MiCo RS SiC CVIR : SEM images

  • · 내산화 향상 및 카본 표면 안정화
  • · 표면 처리 후 치수 안정성 우수
  • · Out-gas 및 이물 개선
  • · 순도 향상 및 이상 반응 방지
  • · 고객사 사용 환경에 따른 다양한 멀티 코팅 적용 가능

Application

Semicon Parts

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MOCVD ARS SUSCEPTOR

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MOCVD ARS SUSCEPTOR

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ARS CFC ROBOT Hand

Functional Parts

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ARS CC NUT

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CFC Reinforced Fasteners

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ARS CFC Fasteners

Heat treating Parts

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ARS Brazing Graphite Mold

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HTT - ARS CFC Setter

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ARS Graphite Heater