MiCo
HTT_RS-CVIR Tech
Through MiCo's CVIR-SiC surface treatment, oxidation resistance and surface stabilization of graphite and C/C products can be implemented. After SiC surface treatment, there is no dimensional deformation, and the surface defects, pinholes, cracks, and carbon fiber exposure in graphite and C/C products are eliminated, effectively controlling outgassing and particle generation.
The maximum usable temperature is A-RS = 1600°C and RS = 1400°C. In some cases, Multi-Layer coatings are possible, and the adhesion of the coating is improved.

Coating Property


MiCo RS SiC CVIR : SEM images
- · 내산화 향상 및 카본 표면 안정화
- · 표면 처리 후 치수 안정성 우수
- · Out-gas 및 이물 개선
- · 순도 향상 및 이상 반응 방지
- · 고객사 사용 환경에 따른 다양한 멀티 코팅 적용 가능
Application
Semicon Parts

MOCVD ARS SUSCEPTOR

MOCVD ARS SUSCEPTOR

ARS CFC ROBOT Hand
Functional Parts

ARS CC NUT

CFC Reinforced Fasteners

ARS CFC Fasteners
Heat treating Parts

ARS Brazing Graphite Mold

HTT - ARS CFC Setter

ARS Graphite Heater