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Main Business

We have developed and manufactured Electrostatic Chuck(ESC) which is a core part of dry etcher equipments for display, and supplied to major domestic and foreign customers.
The Ceramic ESC for display has Upper Electrode and Lower Electrode, which holds and fix the panle through electrostatic forces in the Dry Etcher equipment.

Our company has secured competitiveness through continuous technology development, process improvement, and extepansion of mass-production lines, including success in mass-production of 10.5th generation products for the first time in Korea in 2016. With all our sucesses and technologies, we provides a variety of services such as brand new products, front side repair, and full repair.

LCD/OLED Introduction
division Polyimide ESC APS Coating ESC Ceramic ESC

Application

Semiconductor, Display

Semiconductor, Display

Semiconductor, LED

Material

UPILEX, KAPTON

Ceramic plasma coating

Alumina, aluminium nitride

Advantage

large area

Large area, wear characteristics by plasma

High wear characteristics by High plasma

Life

Normal

Long life

Very long lifespan

Chucking mode

Coulomb

Coulomb

Coulomb or Johnson-Rahbeck

Heat Transfer

Low

High

Very high

Volume resistance (genetics)

Very high

Normal

High

Genetic thickness

25 ~ 125 ㎛

Within 500 ㎛

300 ~ 1,000 ㎛

Sample of MiCo LCD/OLED

LCD ESC (550x500)

10.5G ESC
(Max. 3,500×3,100)

Ceramic ESC (φ300)

Try drag from side to side

Repair
LCD/OLED defect type LCD/OLED repair method

1. Helium Leak (Leak High)

1. Repairs of ceramic sheet reattachments

2. Poor line width

2. Repairs on the side of a static scale

3. Poor De-chuck

3. Repair Ceramic Sheet Surface

4. Contaminant generation

4. Replacing ceramic seats (including paragraphs 1-3)

5. Electrostatic scale breakage (ceramic section)

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