MiCo
Parts Powder
MiCo ’s parts powder is the high-performance powder that can be customized according to customer requirements using various ceramic materials.
This high-performance parts powder demonstrates superior performance and special properties compared to conventional ceramic products, ensuring customer satisfaction and quality reliability through excellent durability, and plays a key role in advanced industries.

Characteristics of Parts Powder
Characteristics & Advantages of Parts Powder
Raw Powder


Mg Spinel Powder
- · High optical property
- · High strength & hardness
- · High thermal resistance


YAG Powder
- · Excellent plasma resistance
- · High optical property
- · Excellent corrosion resistance
Granule Powder


AlN Powder
- · High thermal conductivity
- · High electrical resistivity
- · Low coefficient of thermal expansion


Al2O3 Powder
- · Excellent hardness
- · High wear resistance
- · High electrical resistivity


Y2O3 Powder
- · Excellent plasma resistance
- · High thermal shock resistance
- · High chemical stability


YAG Powder
- · Excellent plasma resistance
- · High optical property
- · Excellent corrosion resistance
Application
Parts materials for semiconductor etching & deposition equipment
Etching process



Deposition process


