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MiCo

Heater

MiCo Heater is a functional component developed based on 20 years of accumulated ceramic material composition and sintering technology, as well as precision machining and bonding techniques.

It enables high productivity by cycling through rapid heating and cooling and delivers uniform heat across the working surface based on excellent flatness and parallelism, resulting in the production of high-quality products. This key component is applied in the Advanced Packaging process, and MiCo manufactures and supplies Heaters in various forms using the materials it has developed.

heater top 이미지

Heater Line Up

ceramic part 슬라이드 이미지

MPH 016

  • Working Zone : 16 x 16mm
  • Temp. Range : 50℃ → 450℃
  • Heating Speed : ≤ 1.5 sec.
  • Cooling Speed : ≤ 3 sec.
  • Load Capacity : ≤ 900N
  • Power Consumption : ≤ 1,538W
ceramic part 슬라이드 이미지

MPH 022

  • Working Zone : 22 x 22mm
  • Temp. Range : 50℃ → 450℃
  • Heating Speed : ≤ 1.5 sec.
  • Cooling Speed : ≤ 3 sec.
  • Load Capacity : ≤ 1,100N
  • Power Consumption : ≤ 1,982W
ceramic part 슬라이드 이미지

MPH 028

  • Working Zone : 28 x 28mm
  • Temp. Range : 50℃ → 450℃
  • Heating Speed : ≤ 2 sec.
  • Cooling Speed : ≤ 12 sec.
  • Load Capacity : ≤ 1,500N
  • Power Consumption : ≤ 2,688W
ceramic part 슬라이드 이미지

MPH 035

  • Working Zone : 35 x 35mm
  • Temp. Range : 150℃ → 450℃
  • Heating Speed : ≤ 3 sec.
  • Cooling Speed : ≤ 10 sec.
  • Load Capacity : ≤ 3,000N
  • Power Consumption : ≤ 6,050W
ceramic part 슬라이드 이미지

MPH 054

  • Working Zone : 54 x 54mm
  • Temp. Range : 50℃ → 450℃
  • Heating Speed : ≤ 22 sec.
  • Cooling Speed : ≤ 30 sec.
  • Load Capacity : ≤ 5,000N
  • Power Consumption : ≤ 5,700W
ceramic part 슬라이드 이미지

MPH 060

  • Working Zone : 60 x 60mm
  • Temp. Range : 50℃ → 450℃
  • Heating Speed : ≤ 22 sec.
  • Cooling Speed : ≤ 30 sec.
  • Load Capacity : ≤ 7,500N
  • Power Consumption : ≤ 5,000W
heater 특징 이미지

MPH 016

  • · Working Zone : 16 x 16mm
  • · Temp. Range : 50℃ → 450℃
  • · Heating Speed : ≤ 1.5 sec.
  • · Cooling Speed : ≤ 3 sec.
  • · Load Capacity : ≤ 900N
  • · Power Consumption : ≤ 1,538W
heater 특징 이미지

MPH 022

  • · Working Zone : 22 x 22mm
  • · Temp. Range : 50℃ → 450℃
  • · Heating Speed : ≤ 1.5 sec.
  • · Cooling Speed : ≤ 3 sec.
  • · Load Capacity : ≤ 1,100N
  • · Power Consumption : ≤ 1,982W
heater 특징 이미지

MPH 028

  • · Working Zone : 28 x 28mm
  • · Temp. Range : 50℃ → 450℃
  • · Heating Speed : ≤ 2 sec.
  • · Cooling Speed : ≤ 12 sec.
  • · Load Capacity : ≤ 1,500N
  • · Power Consumption : ≤ 2,688W
heater 특징 이미지

MPH 035

  • · Working Zone : 35 x 35mm
  • · Temp. Range : 150℃ → 450℃
  • · Heating Speed : ≤ 3 sec.
  • · Cooling Speed : ≤ 10 sec.
  • · Load Capacity : ≤ 3,000N
  • · Power Consumption : ≤ 6,050W
heater 특징 이미지

MPH 054

  • · Working Zone : 54 x 54mm
  • · Temp. Range : 50℃ → 450℃
  • · Heating Speed : ≤ 22 sec.
  • · Cooling Speed : ≤ 30 sec.
  • · Load Capacity : ≤ 5,000N
  • · Power Consumption : ≤ 5,700W
heater 특징 이미지

MPH 060

  • · Working Zone : 60 x 60mm
  • · Temp. Range : 50℃ → 450℃
  • · Heating Speed : ≤ 22 sec.
  • · Cooling Speed : ≤ 30 sec.
  • · Load Capacity : ≤ 7,500N
  • · Power Consumption : ≤ 5,000W

균일한 Heater 표면 열분포 구현

heater 표면 이미지
heater 표면 이미지
heater 표면 이미지

Application

package process 이미지

Material for semiconductor post-processing equipment components

Packaging Process

heater app 이미지
heater app 이미지
heater app 이미지

Flip Chip Bonding

heater app 이미지

TC - Microbump Bonding

heater app 이미지

TC-NCF Bonding

heater app 이미지

HBM

heater app 이미지

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