Parts
Ceramic is a non-metallic material with high strength and chemical stability. It is also an electrical insulator, resistant to high temperatures, and highly wear-resistant. Ceramic can be used in a variety of temperatures and environments and, in some cases, possess optical transparency.
Fine ceramics, in particular, offer exceptional stability at high temperatures, with a dense internal structure that provides excellent resistance to pressure and internal heat transfer. Additionally, Ceramic has minimal environmental impact and exhibit excellent physiological compatibility. Ceramic is expected to play a key role in various advanced industries, including semiconductors, secondary batteries, and aerospace in the future.

Characteristics of Ceramic Parts

Chuck Plate
- · Implements Vacuum Hole on the Target Surface
- · Low Thermal Conductivity (1.51 W/mK @RT)
- · Capable of Precise Machining
- · Excellent Flatness & Parallelism (㎛ level)

Attachment Tool
- · Outstanding Thermal Conductivity (180+ W/mK @RT)
- · Uniform Heat Transfer to Targeted Area
- · Help Reduce the Maintenance Cost
- · Excellent Flatness & Parallelism

Metrology Beam
- · Ultra-Precise Surface Machining (㎛ level)
- · High Hardness

Guide Ring
- · High Hardness
- · Insulating Properties
Application

TC Bonding Equipment

Ceramic Vacuum Chucking Plate

Attachment Tool, Pick & Place

Metal Coated Nozzle