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Parts

Ceramic is a non-metallic material with high strength and chemical stability. It is also an electrical insulator, resistant to high temperatures, and highly wear-resistant. Ceramic can be used in a variety of temperatures and environments and, in some cases, possess optical transparency.

Fine ceramics, in particular, offer exceptional stability at high temperatures, with a dense internal structure that provides excellent resistance to pressure and internal heat transfer. Additionally, Ceramic has minimal environmental impact and exhibit excellent physiological compatibility. Ceramic is expected to play a key role in various advanced industries, including semiconductors, secondary batteries, and aerospace in the future.

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Characteristics of Ceramic Parts

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Chuck Plate

  • · Implements Vacuum Hole on the Target Surface
  • · Low Thermal Conductivity (1.51 W/mK @RT)
  • · Capable of Precise Machining
  • · Excellent Flatness & Parallelism (㎛ level)
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Attachment Tool

  • · Outstanding Thermal Conductivity (180+ W/mK @RT)
  • · Uniform Heat Transfer to Targeted Area
  • · Help Reduce the Maintenance Cost
  • · Excellent Flatness & Parallelism
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Metrology Beam

  • · Ultra-Precise Surface Machining (㎛ level)
  • · High Hardness
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Guide Ring

  • · High Hardness
  • · Insulating Properties

Application

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TC Bonding Equipment

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Ceramic Vacuum Chucking Plate

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Attachment Tool, Pick & Place

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Metal Coated Nozzle